Superelastic metal microsprings fabricated by deterministic rolling of nanomembranes have been anisotropic-strain-engineered via glancing angle deposition. The advantageous applications of metal microsprings in liquid flow rate sensors and chemical-stimulated actuators due to their reliable superelasticity are demonstrated. Theoretical calculation of microspring elongation as a function of flow rate agrees with our experimental observation and reveals that the sensitivity can be well tuned by the geometrical design of the microsprings. Such outstanding mechanical properties of rolled-up metal microsprings should find important applications in future fluidic micro-/nano-devices.
[1]Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China;
[2]Fudan Univ, Sch Informat Sci & Engn, Dept Light Sources & Illuminating Engn, Shanghai 200433, Peoples R China;
[3]Chongqing Univ, Key Disciplines Lab Novel Micronano Device & Syst, Chongqing 400044, Peoples R China;
[4]Chongqing Univ, Microsyst Res Ctr, Chongqing 400044, Peoples R China
(8.0+极速模式)