Graphene, a self-supporting monolayer, has excited enormous interest over the 10 years since its discovery due to its remarkable electrical, mechanical thermal and chemical properties. Here the authors describe the authors' work developing chemical vapour deposition methods to grow monolayer graphene on copper foil substrates and the subsequent transfer process. Raman microscopy, scanning electron microscopy and atomic force microscopy are used to examine the quality of the transferred material. To demonstrate the process, they also describe transfer onto patterned SiO2/Si substrate which forms free suspended graphene drums. These show interesting mechanical properties which are being explored as nanomechanical resonators.
[1]Univ London Imperial Coll Sci Technol & Med, Dept Mat, London SW7 2AZ, England.
[2]Natl Phys Lab, Teddington TW11 0LW, Middx, England.
[3]Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland.
[4]Inst Electr Mat Technol, Div Silicon Microsyst & Nanostruct Technol, PL-05500 Piaseczno, Poland.
[5]Brunel Univ, Dept Mech Aerosp & Civil Engn, Uxbridge UB8 3PH, Middx, England.
[6]Fudan Univ, Sch Informat Sci & Engn, Shanghai 200433, Peoples R China.
(8.0+极速模式)